Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling

Hollow Atomic Force Microscopy Probes for Nanoscale Dispensing of Liquids

To enable the printing of nanometer sized droplets with volumes in the femto and attoliter range and sub-micron droplet spacing, a nanoscale dispenser (NADIS) based on an atomic force microscopy probe has been developed and microfabricated. The probe consists of a cantilever with a hollow core, which is connected to a reservoir located in the chip. The hollow cantilever acts as a microfluidic c...

Magnetic nanoelements for magnetoelectronics made by focused-ion-beam milling

Focused-ion-beam ~FIB! milling has been used to structure magnetic nanoelements from 5 nm thick films of permalloy. We have used focused 30-keV Ga ions to define small arrays (6 mm 36 mm) of wires, circles, and elongated hexagons in the size range 100–500 nm. High-sensitivity magneto-optical measurements combined with atomic force microscopy show that very high quality magnetic nanostructures c...

Improved atomic force microscope cantilever performance by ion beam modification

The performance of atomic force microscopy cantilevers, as measured by the resonant frequency and spring constant, is directly dependent on the shape of the cantilever. Here we have improved the performance of conventional silicon nitride cantilevers by using focused ion beam milling to minimize the width of the cantilever legs. The resonant frequency in solution for any given spring constant i...

Fabrication of advanced probes for atomic force microscopy using focused ion beam

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling.

Uniform period sub-micron gratings have been fabricated using focused ion beam milling on hafnium oxide waveguides. Atomic force microscopy indicates that the gratings have smooth and uniform profiles. At the period of 330 nm, the largest peak-to-peak height that was achieved was 85 nm. Scattering at the grating imperfections was found to be at least two orders of magnitude weaker than the inte...